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1 метод фотолитографии с использованием дальнего УФ-излучения
Русско-английский словарь по микроэлектронике > метод фотолитографии с использованием дальнего УФ-излучения
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2 метод фотолитографии с использованием дальнего ультрафиолетового излучения
Microelectronics: deep-ultraviolet photolithographic technologyУниверсальный русско-английский словарь > метод фотолитографии с использованием дальнего ультрафиолетового излучения
См. также в других словарях:
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as … Wikipedia
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computer — computerlike, adj. /keuhm pyooh teuhr/, n. 1. Also called processor. an electronic device designed to accept data, perform prescribed mathematical and logical operations at high speed, and display the results of these operations. Cf. analog… … Universalium
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
